Method of Determining Nondestructive Pulse Laser Annealing Modes for Dielectric and Semiconductor Wafers
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چکیده
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Report on proposal “Theoretical modeling of ultrashort laser pulse interaction with dielectric and semiconductor materials”
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ژورنال
عنوان ژورنال: Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering
سال: 2015
ISSN: 1609-3577
DOI: 10.17073/1609-3577-2014-3-206-210